Design of Reduced Shear Force Cu Cleaning Processes Via α-β-Unsaturated Chemistries for Enhanced BTA Residue Removal

Authors

Adam T. Caridi
Abigail Dudek
Tatiana R. Cahue
Jason J. Keleher

Category of Work

Article

Publication Title

ECS Meeting Abstracts

DOI

10.1149/MA2024-01201265mtgabs

Publication Date

8-9-2024

Recommended Citation

Caridi, Adam T.; Dudek, Abigail; Cahue, Tatiana R.; and Keleher, Jason J., "Design of Reduced Shear Force Cu Cleaning Processes Via α-β-Unsaturated Chemistries for Enhanced BTA Residue Removal" (2024). Chemistry Department Faculty Articles. 14.
https://digitalcommons.lewisu.edu/chemistry_facpubs/14